Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8591809 | Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same | Tae Sik Yun, Kunhyung Lee, Hyunjoon Kim, Hyeogki Kim, KiDoo Kim | 2013-11-26 |