Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652911 | Method of and apparatus for coating a wafer with a minimal layer of photoresist | Moon W. Kim | 2003-11-25 |
| 6113697 | Method of and apparatus for coating a wafer with a minimal layer of photoresist | Moon W. Kim | 2000-09-05 |