Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5990016 | Dry etching method and apparatus for manufacturing a semiconductor device | Jung Kyu Lee, Sung-Il Kim | 1999-11-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5990016 | Dry etching method and apparatus for manufacturing a semiconductor device | Jung Kyu Lee, Sung-Il Kim | 1999-11-23 |