Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6401003 | Alarm system for semiconductor device fabrication facility | — | 2002-06-04 |
| 6202000 | Monitoring system for semiconductor device fabrication facility | — | 2001-03-13 |
| 5856676 | Water-removing exhaust system for an ion implanter and a method for using the same | Sang G. Oh | 1999-01-05 |