Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7282111 | System and method for monitoring particles contamination in semiconductor manufacturing facilities | — | 2007-10-16 |
| 6843809 | Vacuum/purge operation of loadlock chamber and method of transferring a wafer using said operation | — | 2005-01-18 |
| 6031660 | Analog/digital double automatic power controlling device in an optical fiber amplifier | Do-Hyung Lee | 2000-02-29 |