Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037760 | Temperature controller, temperature measurer, and plasma processing apparatus including the same | Hak-young KIM, Bi-Ah Shin, Jun-Ho Im | 2021-06-15 |
| 10665490 | Apparatus and methods for edge ring replacement, inspection and alignment using image sensors | Ja Woo Lee, Keon Woo Kim, Sun Ho Kim, Eung Su Kim, Hyan-Jung Lee +1 more | 2020-05-26 |
| 8886624 | Searching method using extended keyword pool and system thereof | Hyun-Ho Kim | 2014-11-11 |