Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9933703 | Photolithographic illuminator device enabling controlled diffraction | Bertrand Plainchamp | 2018-04-03 |
| 9874818 | Photolithographic illuminator that is telecentric in two directions | Bertrand Plainchamp | 2018-01-23 |
| 7982855 | Illuminator for a photolithography device | Miguel Boutonne, Francois Riguet | 2011-07-19 |