Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688617 | Electrostatic capacitance sensor | — | 2023-06-27 |
| 7315373 | Wafer positioning method and device, wafer process system, and wafer seat rotation axis positioning method for wafer positioning device | Tomoyuki Shitaku | 2008-01-01 |