Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8158536 | Low dielectric constant films and manufacturing method thereof, as well as electronic parts using the same | Toshio Sakurai, Hiroyuki Sakaue, Shoso Shingubara, Hiroyuki Tomimoto | 2012-04-17 |
| 7749920 | Low dielectric constant films and manufacturing method thereof, as well as electronic parts using the same | Toshio Sakurai, Hiroyuki Sakaue, Shoso Shingubara, Hiroyuki Tomimoto | 2010-07-06 |
| 7371694 | Semiconductor device fabrication method and fabrication apparatus | Ken Sasaki, Hiroyuki Sakaue | 2008-05-13 |
| 7022598 | Method of producing multilayer interconnection structure | Shoso Shingubara, Zenglin Wang | 2006-04-04 |
| 6852624 | Electroless plating process, and embedded wire and forming process thereof | Shoso Shingubara, Hiroyuki Sakaue | 2005-02-08 |
| 5007372 | Vacuum depositing apparatus | Shintarou Hattori, Akira Ishitani | 1991-04-16 |