Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7377736 | Cylinder, load port using it, and production system | Atsuhiro Fujii, Norio Kajita, Mitsuyasu Okabe | 2008-05-27 |
| 7115891 | Wafer mapping device and load port provided with same | — | 2006-10-03 |