Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7387737 | Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void | Richard D. Harris, Robert J. Kretschmann, Mark A. Lucak | 2008-06-17 |
| 7262522 | Microelectromechanical isolating power converter | Richard D. Harris, Patrick C. Herbert, Robert J. Kretschmann, Mark A. Lucak, Robert J. Pond +2 more | 2007-08-28 |
| 7093498 | Microelectromechanical strain gauge with frequency detector | Patrick C. Herbert, Richard D. Harris, Frederick M. Discenzo, Robert J. Kretschmann, Mark A. Lucak +2 more | 2006-08-22 |
| 7018550 | Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void | Richard D. Harris, Robert J. Kretschmann, Mark A. Lucak | 2006-03-28 |
| 6975193 | Microelectromechanical isolating circuit | Richard D. Harris, Robert J. Pond, Louis F. Szabo, Frederick M. Discenzo, Patrick C. Herbert +2 more | 2005-12-13 |
| 6815243 | Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate | Mark A. Lucak, Richard D. Harris, Robert J. Kretschmann | 2004-11-09 |
| 6798312 | Microelectromechanical system (MEMS) analog electrical isolator | Richard D. Harris, Ernst Dummermuth, Robert J. Kretschmann | 2004-09-28 |
| 6768628 | Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap | Richard D. Harris, Robert J. Kretschmann, Mark A. Lucak | 2004-07-27 |
| 6761829 | Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void | Richard D. Harris, Robert J. Kretschmann, Mark A. Lucak | 2004-07-13 |
| 6756310 | Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques | Robert J. Kretschmann, Mark A. Lucak, Richard D. Harris | 2004-06-29 |
| 6617750 | Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise | Ernst Dummermuth, Richard D. Harris | 2003-09-09 |
| 6593870 | MEMS-based electrically isolated analog-to-digital converter | Ernst Dummermuth, Patrick C. Herbert, Jeffrey R. Annis, Steven M. Galecki, Richard D. Harris +2 more | 2003-07-15 |
| 6583374 | Microelectromechanical system (MEMS) digital electrical isolator | Richard D. Harris, Robert J. Kretschmann, Ernst Dummermuth, Patrick C. Herbert | 2003-06-24 |
| 6569701 | Method for fabricating an isolated microelectromechanical system device | Robert J. Kretschmann, Mark A. Lucak, Richard D. Harris | 2003-05-27 |