Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12396202 | Vertical fin field effect transistor, vertical fin field effect transistor arrangement, and method for forming a vertical fin field effect transistor | Daniel Krebs, Alberto Martinez-Limia, Jens Baringhaus, Wolfgang Feiler | 2025-08-19 |
| 9202702 | Semiconductor device having at least one contact, and manufacturing method for a semiconductor device having at least one contact | Frederik Schrey, Achim Trautmann | 2015-12-01 |
| 8791620 | Micromechanical actuator having multiple joints | Tjalf Pirk, Marco Lammer, Veronique Krueger | 2014-07-29 |
| 8470630 | Method for capping a MEMS wafer and MEMS wafer | Thorsten Mueller | 2013-06-25 |
| 7334491 | Sensor arrangement, in particular a micro-mechanical sensor arrangement | Klaus Heyers | 2008-02-26 |
| 6646314 | Method for producing a micromechanical structure and a micromechanical structure | — | 2003-11-11 |
| 6436821 | Method for producing a micromechanical structure and a micromechanical structure | — | 2002-08-20 |