Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787047 | Methods for manufacturing a microstructured sensor | Dietmar Hahn, Gottfried Flik | 2004-09-07 |
| 6174416 | Micromechanical component production method | Horst Magenau, Frank Schatz, Armin Glock, Elke Krauss, Thomas Schittny +1 more | 2001-01-16 |
| 6131880 | Microvalve and method for manufacturing a microvalve | Dietmar Hahn, Heinz Fuchs, Gottfried Flik, Thomas Schittny | 2000-10-17 |
| 5924674 | Microvalve and method for manufacturing a microvalve | Dietmar Hahn, Heinz Fuchs, Gottfried Flik, Thomas Schittny | 1999-07-20 |