Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9322098 | Valve-cell vacuum deposition apparatus including a leak detection device and method for detecting a leak in a vacuum deposition apparatus | — | 2016-04-26 |
| 8858714 | Injector for a vacuum evaporation source | Jean-Louis GUYAUX, Franck STEMMELEN | 2014-10-14 |