Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818990 | Fluorine diffusion barriers for fluorinated dielectrics in integrated circuits | Toh-Ming Lu, Atul Kumar | 2004-11-16 |
| 6527855 | Atomic layer deposition of cobalt from cobalt metallorganic compounds | Toh-Ming Lu, Atul Kumar | 2003-03-04 |