Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7244670 | Enhanced step coverage of thin films on patterned substrates by oblique angle PVD | Tansel Karabacak, Toh-Ming Lu | 2007-07-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7244670 | Enhanced step coverage of thin films on patterned substrates by oblique angle PVD | Tansel Karabacak, Toh-Ming Lu | 2007-07-17 |