Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800556 | Polishing method using ceria slurry, and method of manufacturing semiconductor device | — | 2004-10-05 |
| 6439979 | Polishing apparatus and polishing method using the same | Junji Watanabe | 2002-08-27 |
| 5860851 | Polishing apparatus and polishing method using the same | Junji Watanabe | 1999-01-19 |