| 8034715 |
Method of fabricating semiconductor integrated circuit device |
Shinji Nishihara, Shuji Ikeda, Naotaka Hashimoto, Hiromi Abe, Shinichi Fukada +1 more |
2011-10-11 |
| 7569457 |
Method of fabricating semiconductor device |
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiromi Abe, Masayuki Suzuki |
2009-08-04 |
| 7553766 |
Method of fabricating semiconductor integrated circuit device |
Shinji Nishihara, Shuji Ikeda, Naotaka Hashimoto, Hiromi Abe, Shinichi Fukada +1 more |
2009-06-30 |
| 7314805 |
Method for fabricating semiconductor device |
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiromi Abe, Masayuki Suzuki |
2008-01-01 |
| 7314830 |
Method of fabricating semiconductor integrated circuit device with 99.99 wt% cobalt |
Shinji Nishihara, Shuji Ikeda, Naotaka Hashimoto, Hiromi Abe, Shinichi Fukada +1 more |
2008-01-01 |
| 7214577 |
Method of fabricating semiconductor integrated circuit device |
Shinji Nishihara, Shuji Ikeda, Naotaka Hashimoto, Hiromi Abe, Shinichi Fukada +1 more |
2007-05-08 |
| 7118983 |
Method of fabricating semiconductor device |
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiromi Abe, Masayuki Suzuki |
2006-10-10 |
| 7094655 |
Method of fabricating semiconductor device |
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiromi Abe, Masayuki Suzuki |
2006-08-22 |
| 7094642 |
Method of fabricating semiconductor device |
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiromi Abe, Masayuki Suzuki |
2006-08-22 |
| 7074665 |
Method of fabricating semiconductor device |
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiromi Abe, Masayuki Suzuki |
2006-07-11 |
| 7064040 |
Method of fabricating semiconductor device |
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiromi Abe, Masayuki Suzuki |
2006-06-20 |
| 6858484 |
Method of fabricating semiconductor integrated circuit device |
Shinji Nishihara, Shuji Ikeda, Naotaka Hashimoto, Hiromi Abe, Shinichi Fukada +1 more |
2005-02-22 |
| 6693001 |
Process for producing semiconductor integrated circuit device |
Shinji Nishihara, Shuji Ikeda, Naotaka Hashimoto, Hiromi Abe, Shinichi Fukada +1 more |
2004-02-17 |
| 6670251 |
Method of fabricating semiconductor device |
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiromi Abe, Masayuki Suzuki |
2003-12-30 |
| 6610564 |
Method of fabricating semiconductor device |
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiromi Abe, Masayuki Suzuki |
2003-08-26 |
| 6545326 |
Method of fabricating semiconductor device |
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiromi Abe, Masayuki Suzuki |
2003-04-08 |
| 6300206 |
Method for manufacturing semiconductor device |
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiromi Abe, Masayuki Suzuki |
2001-10-09 |
| 5854870 |
Short-wavelength laser light source |
Sten Helmfrid, Kenchi Ito, Kimio Tatsuno, Kazumi Kawamoto, Tetsuo Andou +5 more |
1998-12-29 |
| 5274727 |
Second harmonic generator and method of fabrication thereof |
Kenchi Ito, Kazumi Kawamoto, Yasuo Hira, Hidemi Sato, Atsuko Fukushima |
1993-12-28 |