Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8562392 | Polishing apparatus and polishing method | Shigeyuki Yoshida, Osamu Ito | 2013-10-22 |
| 8334210 | Method and apparatus of manufacturing semiconductor device | Tomotake Morita | 2012-12-18 |
| 7779848 | Apparatus and method for cleaning semiconductor wafer | — | 2010-08-24 |