Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8748261 | Method of manufacturing semiconductor device, and semiconductor device | — | 2014-06-10 |
| 8609493 | Method of fabricating semiconductor device | Hideo Yamamoto | 2013-12-17 |
| 8222109 | Method of fabricating semiconductor device | Hideo Yamamoto | 2012-07-17 |
| 8071445 | Method for manufacturing semiconductor device, and semiconductor device | — | 2011-12-06 |
| 7863679 | Semiconductor apparatus and method of manufacturing the same | — | 2011-01-04 |
| 5340459 | Reactive sputtering system | — | 1994-08-23 |