| 10002808 |
Semiconductor device manufacturing method and semiconductor device |
Yoshiyuki Abe, Chuichi Miyazaki, Tomoko Higashino |
2018-06-19 |
| 9070560 |
Semiconductor chip with modified regions for dividing the chip |
Yoshiyuki Abe, Chuichi Miyazaki, Tomoko Higashino |
2015-06-30 |
| 8772135 |
Semiconductor device manufacturing method using laser irradiation and dicing saw and semiconductor device thereof |
Yoshiyuki Abe, Chuichi Miyazaki, Tomoko Higashino |
2014-07-08 |
| 8084334 |
Semiconductor device manufacturing method comprising a metal pattern and laser modified regions in a cutting region |
Yoshiyuki Abe, Chuichi Miyazaki, Tomoko Higashino |
2011-12-27 |
| 7892949 |
Semiconductor device manufacturing method comprising a metal pattern and laser modified regions in a cutting region |
Yoshiyuki Abe, Chuichi Miyazaki, Tomoko Higashino |
2011-02-22 |