Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9972591 | Method of manufacturing semiconductor device | — | 2018-05-15 |
| 9536849 | Semiconductor device and manufacturing method of the same | Akira Yajima, Katsuhiro Torii, Hironori Ochi | 2017-01-03 |
| 6843069 | Etching apparatus | Hirofumi Seo | 2005-01-18 |
| 6475334 | Dry etching device and dry etching method | — | 2002-11-05 |