Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7871490 | Inductively coupled plasma generation system with a parallel antenna array having evenly distributed power input and ground nodes and improved field distribution | Harqkyun Kim | 2011-01-18 |
| 6447635 | Plasma processing system and system using wide area planar antenna | — | 2002-09-10 |
| 6445536 | Dielectric stencil-defined write head for MR, GMR, and spin valve high density recording heads | Steven C. Rudy, Hugh C. Hiner, Lien-Chang Wang, Yong Shen, Ut Tran +1 more | 2002-09-03 |
| 6310577 | Plasma processing system with a new inductive antenna and hybrid coupling of electronagnetic power | — | 2001-10-30 |
| 5894400 | Method and apparatus for clamping a substrate | Andrew J. Graven, Melvin J. Schmidt, Kenneth A. McCuen | 1999-04-13 |