Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5703374 | Telecentric NUV-DUV irradiator for out-of-contact exposure of large substrates | — | 1997-12-30 |
| 4907029 | Uniform deep ultraviolet radiant source for sub micron resolution systems | — | 1990-03-06 |
| 4625120 | Deep ultraviolet (DUV) flood exposure system | — | 1986-11-25 |
| 4575636 | Deep ultraviolet (DUV) flood exposure system | — | 1986-03-11 |
| 4432641 | Visual defect inspection of masks | Robert A. Geshner | 1984-02-21 |
| 4378583 | Xenon flash lamp shield | — | 1983-03-29 |
| 4348105 | Radiation shadow projection exposure system | — | 1982-09-07 |
| 4243917 | Flash lamp drive circuit | — | 1981-01-06 |