Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6546804 | Method of making a pressure sensor comprising a resonant beam structure | Goeran Stemme | 2003-04-15 |
| 6182513 | Resonant sensor and method of making a pressure sensor comprising a resonant beam structure | Goeran Stemme | 2001-02-06 |