| 7624742 |
Method for removing aluminum fluoride contamination from aluminum-containing surfaces of semiconductor process equipment |
— |
2009-12-01 |
| 7541094 |
Firepolished quartz parts for use in semiconductor processing |
Gregory H. Leggett |
2009-06-02 |
| 7448397 |
Apparatus for applying disparate etching solutions to interior and exterior surfaces |
— |
2008-11-11 |
| 7427330 |
Cleaning bench for removing contaminants from semiconductor process equipment |
Dwight J. Zuck |
2008-09-23 |
| 7328712 |
Cleaning bench for removing contaminants from semiconductor process equipment |
Dwight J. Zuck |
2008-02-12 |
| 7267132 |
Methods for removing silicon and silicon-nitride contamination layers from deposition tubes |
— |
2007-09-11 |
| 7108002 |
Steam cleaning system and method for semiconductor process equipment |
Kurtis R. Macura |
2006-09-19 |
| 7073522 |
Apparatus for applying disparate etching solutions to interior and exterior surfaces |
— |
2006-07-11 |
| 6936114 |
Steam cleaning system and method for semiconductor process equipment |
Kurtis R. Macura |
2005-08-30 |
| 6926016 |
System for removing contaminants from semiconductor process equipment |
Dwight J. Zuck |
2005-08-09 |
| 6648982 |
Steam cleaning system and method for semiconductor process equipment |
Kurtis R. Macura |
2003-11-18 |
| 6637444 |
Volume efficient cleaning methods |
Dwight J. Zuck |
2003-10-28 |
| 6530388 |
Volume efficient cleaning systems |
Dwight J. Zuck |
2003-03-11 |