Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7624742 | Method for removing aluminum fluoride contamination from aluminum-containing surfaces of semiconductor process equipment | — | 2009-12-01 |
| 7541094 | Firepolished quartz parts for use in semiconductor processing | Gregory H. Leggett | 2009-06-02 |
| 7448397 | Apparatus for applying disparate etching solutions to interior and exterior surfaces | — | 2008-11-11 |
| 7427330 | Cleaning bench for removing contaminants from semiconductor process equipment | Dwight J. Zuck | 2008-09-23 |
| 7328712 | Cleaning bench for removing contaminants from semiconductor process equipment | Dwight J. Zuck | 2008-02-12 |
| 7267132 | Methods for removing silicon and silicon-nitride contamination layers from deposition tubes | — | 2007-09-11 |
| 7108002 | Steam cleaning system and method for semiconductor process equipment | Kurtis R. Macura | 2006-09-19 |
| 7073522 | Apparatus for applying disparate etching solutions to interior and exterior surfaces | — | 2006-07-11 |
| 6936114 | Steam cleaning system and method for semiconductor process equipment | Kurtis R. Macura | 2005-08-30 |
| 6926016 | System for removing contaminants from semiconductor process equipment | Dwight J. Zuck | 2005-08-09 |
| 6648982 | Steam cleaning system and method for semiconductor process equipment | Kurtis R. Macura | 2003-11-18 |
| 6637444 | Volume efficient cleaning methods | Dwight J. Zuck | 2003-10-28 |
| 6530388 | Volume efficient cleaning systems | Dwight J. Zuck | 2003-03-11 |