Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776849 | Through silicon via fabrication | Robert E. Higashi, Son T. Lu | 2023-10-03 |
| 11430695 | Through silicon via fabrication | Robert E. Higashi, Son T. Lu | 2022-08-30 |
| 10867855 | Through silicon via fabrication | Robert E. Higashi, Son T. Lu | 2020-12-15 |