Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8358458 | Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices | James Randolph Webster, Xiaoming Yan, Wonsuk Chung | 2013-01-22 |
| 8222066 | Eliminate release etch attack by interface modification in sacrificial layers | QI-YAN LUO, Chia-Wei Yang, David Heald, Evgeni Gousev, Chih-Wei Chiang | 2012-07-17 |
| 7851239 | Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices | James Randolph Webster, Xiaoming Yan, Wonsuk Chung | 2010-12-14 |