Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064124 | Silicon-rich silicon nitrides as etch stops in MEMS manufacture | Wonsuk Chung, Teruo Sasagawa | 2011-11-22 |
| 7382515 | Silicon-rich silicon nitrides as etch stops in MEMS manufacture | Wonsuk Chung, Teruo Sasagawa | 2008-06-03 |