Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7636151 | System and method for providing residual stress test structures | Manish Kothari, Clarence Chui | 2009-12-22 |
| 7623287 | Non-planar surface structures and process for microelectromechanical systems | Teruo Sasagawa, Ming-Hau Tung | 2009-11-24 |
| 7612932 | Microelectromechanical device with optical function separated from mechanical and electrical function | Clarence Chui, Denis Endisch, Ming-Hau Tung, Yeh-Jiun Tung, Chih-Wei Chiang | 2009-11-03 |
| 7595926 | Integrated IMODS and solar cells on a substrate | Teruo Sasagawa, Ming-Hau Tung | 2009-09-29 |
| 7564613 | Microelectromechanical device and method utilizing a porous surface | Teruo Sasagawa | 2009-07-21 |
| 7550810 | MEMS device having a layer movable at asymmetric rates | Marc Mignard | 2009-06-23 |
| 7527996 | Non-planar surface structures and process for microelectromechanical systems | QI-YAN LUO, Sriram Akella | 2009-05-05 |
| 7527998 | Method of manufacturing MEMS devices providing air gap control | Ming-Hau Tung | 2009-05-05 |
| 7450295 | Methods for producing MEMS with protective coatings using multi-component sacrificial layers | Ming-Hau Tung | 2008-11-11 |
| 7417784 | Microelectromechanical device and method utilizing a porous surface | Teruo Sasagawa | 2008-08-26 |
| 7385744 | Support structure for free-standing MEMS device and methods for forming the same | Ming-Hau Tung, Brian W. Arbuckle | 2008-06-10 |