Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7669310 | Method of manufacturing an acoustic mirror | — | 2010-03-02 |
| 7535324 | Piezoelectric resonator structure and method for manufacturing a coupled resonator device | Klaus Diefenbeck, Peter Mueller, Winfried Nessler | 2009-05-19 |
| 7491569 | Method for manufacturing a patterned bottom electrode in a piezoelectric device | Klaus Diefenbeck | 2009-02-17 |
| 6933807 | Acoustic reflector for a BAW resonator providing specified reflection of both shear waves and longitudinal waves | Stephan Marksteiner, Robert Aigner, Jyrki Kaitila | 2005-08-23 |