Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6084257 | Single crystal silicon sensor with high aspect ratio and curvilinear structures | Kurt E. Petersen, Wendell McCulley, John Logan, Erno Klaasen, Jan Mark Noworolski | 2000-07-04 |
| 6038928 | Miniature gauge pressure sensor using silicon fusion bonding and back etching | John Logan, Gertjan van Sprakelaar | 2000-03-21 |
| 5731874 | Discrete wavelength spectrometer | — | 1998-03-24 |
| 5135609 | Quantum lithography mask and fabrication method | R. Fabian W. Pease | 1992-08-04 |