Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424417 | Substrate processing apparatus and substrate processing method | Kwang Sung Yoo, Tae Hwan YOUN | 2025-09-23 |
| 11776791 | Substrate processing apparatus and substrate processing method | Jong Chan LEE, Kwang Sung Yoo, Seok-June YUN | 2023-10-03 |
| 11295933 | Substrate processing apparatus and substrate processing method | Tae Hwan YOUN, Jong Chan LEE | 2022-04-05 |