Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6998277 | Method of planarizing spin-on material layer and manufacturing photoresist layer | Nien-Yu Tsai, Shu-Ching Yang | 2006-02-14 |
| 6743726 | Method for etching a trench through an anti-reflective coating | Nien-Yu Tsai | 2004-06-01 |