Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6507389 | Photolithography system having a frequency domain filtering mask | — | 2003-01-14 |
| 6498644 | Alignment system of wafer stage | — | 2002-12-24 |
| 6441883 | Method and apparatus to reduce bias between dense and sparse photoresist patterns | — | 2002-08-27 |
| 6242137 | Method to uni-directionally expand bandwidth of an asymmetric optical system | — | 2001-06-05 |