Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8803112 | Silicon-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during silicon ion implantation | Lloyd Anthony Brown, Serge M. Campeau | 2014-08-12 |
| 8603363 | Compositions for extending ion source life and improving ion source performance during carbon implantation | Lloyd Anthony Brown, Serge M. Campeau | 2013-12-10 |