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Yttrium-doped bismuth titanate thin film and preparation thereof |
Sang-Woo Kang |
2007-07-31 |
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Method for preparing low dielectric films |
Sang-Ki Kwak |
2006-08-08 |
| 6858251 |
Lanthanum complex and process for the preparation of a BLT layer using same |
Sang-Woo Kang |
2005-02-22 |
| 6774038 |
Organometal complex and method of depositing a metal silicate thin layer using same |
Sang-Woo Kang, Won Hee NAM |
2004-08-10 |
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Organometallic complex process for the preparation thereof and metal organic chemical vapor deposition using same |
Jae Young Shim, Jung-hyun Lee, Dae Hwan Kim |
2001-08-14 |
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Process for preparation of diffusion barrier for semiconductor |
Ju-Young Yun |
2001-01-09 |
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Process for selective metal deposition in holes of semiconductor device |
Jong-Ho Yun |
2000-10-17 |
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Organocuprous precursors for chemical vapor deposition of a copper film |
Doo-Hwan Cho, Jai Wook Park, Sang-Woo Kang |
2000-07-18 |