Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901903 | Electrical pulse compression circuit | — | 2024-02-13 |
| 9578729 | Extreme ultraviolet source with dual magnetic cusp particle catchers | — | 2017-02-21 |
| 9544986 | Extreme ultraviolet source with magnetic cusp plasma control | — | 2017-01-10 |
| 9301380 | Extreme ultraviolet source with magnetic cusp plasma control | — | 2016-03-29 |
| 9155178 | Extreme ultraviolet source with magnetic cusp plasma control | — | 2015-10-06 |
| 8592788 | Lithium extreme ultraviolet source and operating method | — | 2013-11-26 |
| 8569724 | Induction heated buffer gas heat pipe for use in an extreme ultraviolet source | — | 2013-10-29 |
| 8440988 | Pulsed discharge extreme ultraviolet source with magnetic shield | — | 2013-05-14 |
| 8269199 | Laser heated discharge plasma EUV source | — | 2012-09-18 |
| 7637403 | Liquid metal droplet generator | — | 2009-12-29 |
| 7479646 | Extreme ultraviolet source with wide angle vapor containment and reflux | — | 2009-01-20 |
| 7079306 | Optically addressed extreme ultraviolet modulator and lithography system incorporating modulator | — | 2006-07-18 |
| 7075096 | Injection pinch discharge extreme ultraviolet source | — | 2006-07-11 |
| 6728337 | Star pinch plasma source of photons or neutrons | — | 2004-04-27 |
| 6567499 | Star pinch X-ray and extreme ultraviolet photon source | — | 2003-05-20 |
| 6421421 | Extreme ultraviolet based on colliding neutral beams | — | 2002-07-16 |
| 6408052 | Z-pinch plasma X-ray source using surface discharge preionization | — | 2002-06-18 |
| 6075838 | Z-pinch soft x-ray source using diluent gas | — | 2000-06-13 |
| 5504795 | Plasma X-ray source | — | 1996-04-02 |
| 5502356 | Stabilized radial pseudospark switch | — | 1996-03-26 |
| 5003226 | Plasma cathode | — | 1991-03-26 |