Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4349647 | Resist material for micro-fabrication | Kohtaro Nagasawa, Fujio Tanaka, Yumi Shibata | 1982-09-14 |
| 4299911 | High energy radiation curable resist material and method of using the same | Yumi Shibata, Kohtaro Nagasawa | 1981-11-10 |
| 4273858 | Resist material for micro-fabrication with unsaturated dicarboxylic moiety | Kohtaro Nagasawa, Fujio Tanaka, Yumi Shibata | 1981-06-16 |