Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10580675 | Wafer storage container | Seok Mun Yoon, Myoung Sok Han, Hyun Sin Kim | 2020-03-03 |
| 10497588 | EFEM, equipment front end module | — | 2019-12-03 |
| 10358736 | Purge gas spraying plate for fume removing of a semiconductor manufacturing apparatus | — | 2019-07-23 |
| 9842746 | Purge gas spraying plate and fume removing apparatus having the same | — | 2017-12-12 |