Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10608517 | Planar positioning apparatus and positioning table | — | 2020-03-31 |
| 10461612 | Planar positioning apparatus and positioning table | — | 2019-10-29 |
| 5424597 | Adjusting device with piezo drive | Harry Marth | 1995-06-13 |