Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843704 | Method and apparatus for automatically loading a double-sided polishing machine with wafer crystals | — | 2005-01-18 |
| 6447382 | Apparatus for removing semiconductor wafers from within the runner disks of a double-sided polishing machine | — | 2002-09-10 |
| 6050885 | Device for the chemical-mechanical polishing of an object, in particular a semiconductor wafer | Georg Mörsch, Thomas Keller | 2000-04-18 |