Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7101258 | Double sided polishing machine | — | 2006-09-05 |
| 6780083 | Apparatus and method for the chemical mechanical polishing of the surface of circular flat workpieces, in particular semi-conductor wafers | Marc Reichmann, Thomas Keller | 2004-08-24 |