Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4933714 | Apparatus and method for reproducing a pattern in an annular area | Daniel N. Galburt, Charles Karatzas, Harry Sewell, Frits Zernike | 1990-06-12 |
| 4907035 | Universal edged-based wafer alignment apparatus | Daniel N. Galburt | 1990-03-06 |