TF

Taku Fukada

PC Pearl Kogyo Co.: 1 patents #3 of 30Top 10%
Overall (All Time): #3,433,220 of 4,157,543Top 85%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7132040 Matching unit for semiconductor plasma processing apparatus Etsuo Yamagishi, Yukio Sato, Katsumi Takahashi 2006-11-07