Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7132040 | Matching unit for semiconductor plasma processing apparatus | Etsuo Yamagishi, Yukio Sato, Katsumi Takahashi | 2006-11-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7132040 | Matching unit for semiconductor plasma processing apparatus | Etsuo Yamagishi, Yukio Sato, Katsumi Takahashi | 2006-11-07 |