Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7415780 | Method and apparatus for removing liquid from substrate surfaces using suction | Mark G. Dye | 2008-08-26 |
| 7238085 | Method and apparatus to process substrates with megasonic energy | Garry Montierth, Sharyl Maraviov, Ahmed Busnaina | 2007-07-03 |
| 6959503 | Method and apparatus for removing liquid from substrate surfaces using suction | Mark G. Dye | 2005-11-01 |
| 6595224 | Bath system with sonic transducers on vertical and angled walls | Sharyl Maraviov | 2003-07-22 |
| 6098643 | Bath system for semiconductor wafers with obliquely mounted transducers | — | 2000-08-08 |
| 5868861 | Washing unit for joint seal in a semiconductor bath system | — | 1999-02-09 |
| 5813656 | Modular dump valve assembly in a semiconductor bath system | — | 1998-09-29 |
| 5393347 | Method and apparatus for removable weir overflow bath system with gutter | — | 1995-02-28 |
| 5279316 | Multiprocessing sonic bath system for semiconductor wafers | — | 1994-01-18 |
| 4955402 | Constant bath system with weir | — | 1990-09-11 |
| 4749988 | Non-invasive liquid level sensor | Allan Berman | 1988-06-07 |