Apparatus and method for holding and planarizing thin workpieces

Assignee

• Bell Telephone Laboratories

Inventors

• Victor A. Firtion (2 patents)
• Donald R. Herriott (2 patents)
• Martin E. Poulsen (4 patents)
• Leif Rongved (2 patents)
• Thomas E. Saunders (3 patents)

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