Cantilever pressure sensor with division portions for dividing lever resistance and having piezoresistor element

Assignee

• The University Of Tokyo
• Seiko Instruments

Inventors

• Isao Shimoyama (24 patents)
• Kiyoshi Matsumoto (61 patents)
• Hidetoshi Takahashi (23 patents)
• Minh-Dung Nguyen (9 patents)
• Takeshi Uchiyama (23 patents)
• Manabu Oumi (85 patents)
• Yoko Shinohara (34 patents)
• Masayuki Suda (28 patents)

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