Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS device and process

MEMS device and process

US Patent 9994440 · Granted Jun 12, 2018

Estimated economic value: $5,317,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

MEMS microphone2025
Photonic integrated circuit, opto-electronic system and method2025
Micro-electro-mechanical system and electro-acoustic conversion device having th2025
Microelectromechanical system membrane2025
Microelectromechanical system2025
Sealed dual membrane structure and device including the same2025
Microelectromechanical system and process of making it2024
Comb-drive device used in micro electro mechanical system2024
Environmentally protected photonic integrated circuit2024
Cantilever microphone2024
MEMS device2024
MEMS device2024