Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vacuum pump system including scroll pump and secondary pumping mechanism

Vacuum pump system including scroll pump and secondary pumping mechanism

US Patent 9982666 · Granted May 29, 2018

Estimated economic value: $76,837,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Air gap magnetic coupling with thermal isolation2025
Double sided oil film thrust bearing in a scroll pump2024
Air gap magnetic coupling with counterbalanced force2024
Thermal/noise management in a scroll pump2019
Vacuum pump system with light gas pumping and leak detection apparatus comprisin2018
Thermal/noise management in a scroll pump2017
Vacuum scroll pump having pressure-balanced orbiting plate scroll2017
Vibration/noise management in a scroll compressor2016
Scroll pump having axially compliant spring element2016
Scroll pump having bellows providing angular synchronization and back-up system 2016
Scroll vacuum pump having external axial adjustment mechanism2016
Scroll pump having axially compliant spring element2016